On-Wafer Delta Tuners

Delta Tuners for On-Wafer Measurements

Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.

120GHz Delta | 24-120GHz F0, 2F0, 3F0
High Frequency Delta | 2-50GHz F0
High Frequency Delta | 5-67GHz F0, 2F0, 3F0
Low Frequency Delta | 1.8-40GHz F0, 2F0, 3F0

Integrations | Delta Tuners for On-Wafer Measurements

Integration with FormFactor
Integration with MPI

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Traditional Tuners with Cable

DELTA Tuners

On-Wafer DELTA Tuners' List

#		Model	Min Frequency	Max Frequency
#	wdt_ID	Model	Min Frequency	Max Frequency	VSWR	Connector Type	Type	Datasheets	Request Quote
29	26	M3620	2.0	36.0	10:1 - 50:1	2.92 mm	f0, 2f0, 3f0 (Low Frequency DELTA)
17	191	L3018	1.8	30.0	10:1 - 50:1	3.5 mm	f0, 2f0 (Low Frequency DELTA)
18	50	L3620	2.0	36.0	10:1 - 50:1	2.92 mm	f0, 2f0 (Low Frequency DELTA)
19	192	L4030	3.0	40.0	10:1 - 50:1	2.92 mm	f0, 2f0 (Low Frequency DELTA)
24	194	L6750B	5.0	67.0	6:1 - 50:1	1.85 mm	f0, 2f0 (High Frequency DELTA)
25	195	L67100B	10.0	67.0	10:1-50:1	1.85 mm	f0, 2f0 (High Frequency DELTA)
26	193	L110240	24.0	110.0	6:1 - 30:1	1 mm	f0, 2f0 (High Frequency DELTA)
32	253	M4080B	8.0	40.0	10:1 - 50:1	2.92 mm	f0, 2f0, 3f0 (High Frequency DELTA)
3	88	C3620	2.0	36.0	≥ 10:1 (typ. 15:1)	2.92 mm	f0 (Low Frequency DELTA)
4	93	C4030	3.0	40.0	≥ 10:1 (typ. 15:1)	2.92 mm	f0 (Low Frequency DELTA)
16	186	C120270	27.0	120.0	≥ 6.5:1	1 mm	f0 (High Frequency DELTA)
8	119	C5060B	6.0	50.0	≥ 10:1 (typ. 15:1)	2.4 mm	f0 (High Frequency DELTA)
9	120	C5080B	8.0	50.0	≥ 10:1 (typ. 15:1)	2.4 mm	f0 (High Frequency DELTA)
11	124	C67100B	10.0	67.0	≥ 10:1 (typ. 15:1)	1.85 mm	f0 (High Frequency DELTA)
12	129	C110240	24.0	110.0	≥ 8:1	1 mm	f0 (High Frequency DELTA)
33	131	M5060B	6.0	50.0	7:1 - 50:1	2.4 mm	f0, 2f0, 3f0 (High Frequency DELTA)
34	132	M5080B	8.0	50.0	10:1 - 50:1	2.4 mm	f0, 2f0, 3f0 (High Frequency DELTA)
36	135	M67100B	10.0	67.0	10:1 - 50:1	1.85 mm	f0, 2f0, 3f0 (High Frequency DELTA)
21	138	L4080B	8.0	40.0	10:1 - 50:1	2.92 mm	f0, 2f0 (High Frequency DELTA)
22	139	L5060B	6.0	50.0	7:1 - 50:1	2.4 mm	f0, 2f0 (High Frequency DELTA)
23	140	L5080B	8.0	50.0	10:1	2.4 mm	f0, 2f0 (High Frequency DELTA)
27	197	L120270	27.0	120.0	6:1 - 30:1	1 mm	f0, 2f0 (High Frequency DELTA)
37	161	M110240	24.0	110.0	6:1 - 30:1	1 mm	f0, 2f0, 3f0 (High Frequency DELTA)
38	202	M120270	27.0	120.0	6:1 - 30:1	1 mm	f0, 2f0, 3f0 (High Frequency DELTA)
20	242	L4060B	6.0	40.0	10:1 - 50:1	2.92 mm	f0, 2f0 (High Frequency DELTA)
35	198	M6750B	5.0	67.0	6:1 - 50:1	1.85 mm	f0, 2f0, 3f0 (High Frequency DELTA)
7	169	C5020B	2.0	50.0	≥ 10:1	2.4 mm	f0 (High Frequency DELTA)
13	176	C110500	50.0	110.0	≥ 10:1 (typ. 12:1)	1 mm	f0 (High Frequency DELTA)
1	177	C2607	0.7	26.5	≥ 10:1 (typ. 15:1)	3.5 mm	f0 (Low Frequency DELTA)
28	179	M3018	1.8	30.0	10:1 - 50:1	3.5 mm	f0, 2f0, 3f0 (Low Frequency DELTA)
30	180	M4030	3.0	40.0	10:1 - 50:1	2.92 mm	f0, 2f0, 3f0 (Low Frequency DELTA)
31	252	M4060B	6.0	40.0	10:1 - 50:1	2.92 mm	f0, 2f0, 3f0 (High Frequency DELTA)
2	233	C3018	1.8	30.0	≥ 10:1 (typ. 15:1)	3.5 mm	f0 (Low Frequency DELTA)
5	236	C4060B	6.0	40.0	≥ 10:1	2.92 mm	f0 (High Frequency DELTA)
6	237	C4080B	8.0	40.0	≥ 10:1	2.92 mm	f0 (High Frequency DELTA)
10	238	C6750B	5.0	67.0	≥ 6:1	1.85 mm	f0 (High Frequency DELTA)

	Model	Min Frequency	Max Frequency	Type
wdt_ID	Model	Min Frequency	Max Frequency	Type	Datasheets
38	L3620	2.0	36.0	Multi-Harmonic Low Frequency DELTA
37	L3020	2.0	30.0	Multi-Harmonic Low Frequency DELTA
35	C120270	27.0	120.0	Fundamental High Frequency DELTA
36	L3018	1.8	30.0	Multi-Harmonic Low Frequency DELTA
32	C110240	24.0	110.0	Fundamental High Frequency DELTA
33	C110270	27.0	110.0	Fundamental High Frequency DELTA
34	C110500	50.0	110.0	Fundamental High Frequency DELTA
31	C67100	10.0	67.0	Fundamental High Frequency DELTA
28	C5020	2.0	50.0	Fundamental High Frequency DELTA
24	C2607	0.7	26.5	Fundamental Low Frequency DELTA
25	C3020	2.0	30.0	Fundamental Low Frequency DELTA
26	C3620	2.0	36.0	Fundamental Low Frequency DELTA
27	C4030	3.0	40.0	Fundamental Low Frequency DELTA
29	C5060	6.0	50.0	Fundamental High Frequency DELTA
30	C5080	8.0	50.0	Fundamental High Frequency DELTA
39	L4030	3.0	40.0	Multi-Harmonic Low Frequency DELTA
40	L4080	8.0	40.0	Multi-Harmonic High Frequency DELTA
41	L5060	6.0	50.0	Multi-Harmonic High Frequency DELTA
42	L5080	8.0	50.0	Multi-Harmonic High Frequency DELTA
43	L6750B	5.0	67.0	Multi-Harmonic High Frequency DELTA
44	L67100B	10.0	67.0	Multi-Harmonic High Frequency DELTA
45	L67100	10.0	67.0	Multi-Harmonic High Frequency DELTA
46	L110240	24.0	110.0	Multi-Harmonic High Frequency DELTA
47	L110270	27.0	110.0	Multi-Harmonic High Frequency DELTA
48	L120270	27.0	120.0	Multi-Harmonic High Frequency DELTA
49	M3018	1.8	30.0	Multi-Harmonic Low Frequency DELTA
50	M3020	2.0	30.0	Multi-Harmonic Low Frequency DELTA
51	M3620	2.0	36.0	Multi-Harmonic Low Frequency DELTA
52	M4030	3.0	40.0	Multi-Harmonic Low Frequency DELTA
53	M5060	6.0	50.0	Multi-Harmonic High Frequency DELTA
54	M5080	8.0	50.0	Multi-Harmonic High Frequency DELTA
55	M6750B	5.0	67.0	Multi-Harmonic High Frequency DELTA
56	M67100	10.0	67.0	Multi-Harmonic High Frequency DELTA
57	M110240	24.0	110.0	Multi-Harmonic High Frequency DELTA
58	M110270	27.0	110.0	Multi-Harmonic High Frequency DELTA
59	M120270	27.0	120.0	Multi-Harmonic High Frequency DELTA