Focus filed a US patent application on “INTEGRATED TERA-HERTZ SLIDE SCREW TUNER”
A waveguide low profile slide-screw impedance tuner, for high tuning range (GAMMA) and seamless on-wafer integration, uses spring-loaded control of gold-plated alumina (Al2O3) tuning probe, controlling amplitude and phase of the reflection factor using miniature high precision piezo-electric actuators. This ensures the highest possible passive reflection factor GAMMA at THz frequencies. The tuner is integrated on appropriately modified commercially available THz waveguide wafer probes.
