Waveguide Tuners with Planarity Adjustment for Wafer Probing / 8,933,707

Number: 
8,933,707
Date: 
Tuesday, January 13, 2015
Abstract: 

Abstract:
An assembly of electro-mechanical impedance tuner and signal processing unit covering frequencies in the millimeter-wave region (26- 110GHz) uses wafer probes to test chips on wafer with capacity of adjusting the probe tip planarity. The assembly uses flexible waveguide between the tuner test port and the wafer probe port and micrometer adjustment of the planarity angle 8 between the plan of the probe tips and the wafer surface in order to optimize RF and DC contact.