A Method for Planarity Alignment of Waveguide Wafer Probes / 9,355,345

Tuesday, May 10, 2016

A “theta” angle adjustment method for waveguide probes uses an adjustable solid parallelepiped that allows the wafer probes to be fastened to the auxiliary equipment under correcting “theta” angles and a flange holding and securing bracket that allows one waveguide section to rotate against the other. The alignment procedure requires one of both flanges to have its aligning pin holes and fastening screw threads replaced by circular (oval) holes, allowing the waveguide sections to rotate axially against each-other. The Theta angle is adjusted by repeated trial and error fastening and unfastening the securing bracket under firm pressure of the probe body against the solid support parallelepiped. Read More