A mechanically balanced automatic microwave tuner is described for use in on-wafer device testing. Using low loss rigid airlines to connect the tuner and the devices causes mechanical movements of the wafer probes, when the tuner mobile carriage moves horizontally. Balancing the tuner by means of exactly positioned and dimensioned mobile counterweights, driven by the same mechanism as the tuner carriage itself, allows for compensation of the probe movement and safe on wafer testing.
Mechanically balanced microwave load pull tuner / 7,102,457
Tuesday, September 5, 2006