A Hermetic RF Connection for On-Wafer Operation / 15/440,734

Number: 
15/440,734
Date: 
Thursday, February 23, 2017
Abstract: 

A hermetically sealed link for low loss coaxial airline connection between the wafer probe and the RF connector of an external instrument with 30 or 45 degrees wafer probes allows continuous, micro-positioner controlled, 3 axis horizontal and vertical probe movement. A flexible sealing ring ensures airtight and/or RF-EMI shielded operation. A metallic or plastic collar ensures wafer testing under EMI, airtight or high temperature conditions