NEW PATENT: Waveguide Tuners with Planarity Adjustment for Wafer Probing

Abstract:
An assembly of electro-mechanical impedance tuner or signal processing unit covering frequencies in the millimeterwave region (26- llOGHz) uses wafer probes to test chips on wafer with capacity of adjusting the probe tip planarity. The assembly uses flexible waveguide between the tuner test port and the wafer probe port and micrometer adjustment of the planarity angle Theta between the plan of the probe tips and the wafer surface in order to optimize RF and DC contact.